@DeepThought
Sure there would be waste, my field is computer chip manufacturing and for instance one field I worked was ion implanters and that technology coats an entire wafer with whatever is implanted, the implant covers 100% of the chip and more.
So clearly there would be losses there, but still if you implant a normal level the amount per wafer is very small per wafer and I might add there are hundreds or thousands of chips on that wafer, some of which are a full 18 inches, nearly 1 full half meter in diameter. That said, the way the selenium would be used in that machine would be either some kind of a selenium containing gas coming from a lecture bottle or a sold piece in the source. What I am used to in the solid arena is stuff like pure arsenic which has a low vaporization temp, like 150 ish C or there abouts . My guess is in that tech selenium would be needed to be heated to a much higher degree than arsenic so it would probably come in a gas form.
Now coming out of the 'source' that gas goes through a magnetic ion separation and so only selenium comes out of that part of the machine. Then there is a small hole in a piece of graphite that allows a more collimated beam to go into the accelerators and focusing magnets. In each of those steps some selenium will be lost, coating onto the inner shields and onto the accelerator rings and some onto the magnets and then down the beamline spreading out some and again more lost but still the actual mass of such a process is very low, micrograms lost per run.
If the selenium is used in a sputtering tool, the 'target' would be composed of very pure selenium and in our machines it would be a slab about 125 X 350 millimeters and maybe 10 mm thick. In that case, the magnetic fields that confine the activated argon background gas, activated by some level of RF, in our case, the medical frequency of 13.56 MHz which is an industrial freebie and using up to 1500 or more watts so argon is a great bead blaster in a vacuum and the argon beats on the selenium so some selenium gets blasted off and forms a cloud where some of it gets to the platen which has the parts to be coated.
In that technology, a LOT of selenium is lost just coating the shielding plates and such and everything else in sight.
Also the magnetic field is constructed in such a way as to only have the argon ions whack the selenium target only in a shape like a horse race track.
So probably only about 20% of the selenium ever gets blasted off the target in the first place. That selenium is held in place by a solder of indium and eventually the continued use of that target would punch right through the selenium layer, hitting first the thin layer of indium and then the thick copper backing plate so that limits the lifespan of that target.
That said, if you wanted to be ergonomic you could theoretically take off the selenium, get rid of the indium and melt it down to make a new target so at least THAT would not be lost but I don't see that with our target materials, like Silicon Carbide, Tungsten/tin, SIO2, and the like, those targets just get chucked and a new one ordered.
But of course we have been known to sputter gold and you can say for sure THAT gold would be reused!